Modeling and Characterization of Pre-Charged Collapse-Mode CMUTs
نویسندگان
چکیده
Recently, the applications of ultrasound transducers expanded from high-end diagnostic tools to point care devices and wireless power receivers for implantable devices. These new additionally require that transducer technology must comply biocompatibility manufacturing scalability. In this respect, Capacitive Micromachined Ultrasound Transducers (CMUTs) have a strong advantage compared conventional PZT based transducers. However, current CMUTs large DC bias voltage their operation, which limits miniaturizability these study, we propose pre-charged collapse-mode CMUT immersive can operate without an external by means charge trapping Al 2 O xmlns:xlink="http://www.w3.org/1999/xlink">3 layer embedded in dielectrics between top bottom electrodes. The built-in was analytically modeled four stack combinations were investigated characterized. measurement results then used fit model quantify amount type trapped charge. It found polarize due ferroelectric-like behavior , stored charge-trapping estimated be approximately 0.02C/m 2 . Their acoustic performance shows transmit receive sensitivity 8.8 kPa/V 13.1V/MPa respectively. addition, show increasing charging temperature, duration, higher Finally, ALT tests showed lifetime more than 2.5 years at body temperature.
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ژورنال
عنوان ژورنال: IEEE open journal of ultrasonics, ferroelectrics, and frequency control
سال: 2023
ISSN: ['2694-0884']
DOI: https://doi.org/10.1109/ojuffc.2023.3240699